High temperature wear-resistant and corrosion-resistant thermocouple for silicon nitride furnace

Overview of Thermocouples for Silicon Nitride Furnaces

Thermocouples for Silicon Nitride Furnaces are sensors used to measure the temperature of silicon nitride furnaces. It usually consists of thermocouple wire, protection tube, insulation material and so on. With the characteristics of high-temperature resistance, oxidation resistance, corrosion resistance, etc., it can work stably in the harsh environment of a silicon nitride furnace, measure the temperature accurately, provide key data for the temperature control of silicon nitride furnace, ensure the stability and reliability of the production process of silicon nitride materials, and help to improve the quality of the product and the production efficiency.

Features of Thermocouples for Silicon Nitride Furnaces

Thermocouples for Silicon Nitride Furnaces have the following significant features:

High-temperature resistance: Silicon nitride furnaces work at high temperatures, usually up to 1000 ℃ or even higher. The thermocouple for silicon nitride furnace adopts a special material and structure design, which can withstand such a high-temperature environment, maintain stable performance, accurately measure the temperature, and will not be damaged due to high temperature or produce large measurement errors.

Good chemical stability: the atmosphere inside the silicon nitride furnace is complex and may contain various corrosive gases and chemicals. The thermocouple has good chemical stability, can resist the erosion of these corrosive substances, and does not easily oxidize sulfide and other chemical reactions so as to ensure the service life of the thermocouple and measurement accuracy.

Good thermal shock resistance: In the heating and cooling process of silicon nitride furnaces, the temperature changes dramatically, which will produce large thermal stress. Thermocouples for silicon nitride furnaces have excellent thermal shock resistance, can withstand rapid temperature changes, and are not prone to cracks, breaks and other problems, ensuring that they can still work properly in frequent thermal cycles.

High precision: In order to ensure the production quality of silicon nitride materials, the temperature measurement precision of the furnace is required to be high. Thermocouples for silicon nitride furnaces can accurately measure the temperature, and its measurement error can be controlled within a small range, providing accurate data support for process control.

Fast response speed: thermocouples for silicon nitride furnaces can quickly sense the temperature change in the furnace and convert the temperature signal into electrical signal output in time so that the control system can quickly respond to the furnace temperature for accurate adjustment, which is conducive to improving the degree of automation of the production process and the stability of product quality.

Specifications table of Thermocouples for Silicon Nitride Furnaces

Thermocouple Type	Measuring Range	Accuracy Class	Protection Tube Material	Thermal Response Time	Diameter of Protection Tube	Length Specification
WRN – 530 (K – type)4	0 – 1100℃	I, II4	1Cr18Ni9Ti, GH3030, etc4	90s4	Φ16, Φ254	500×500, 750×750, etc4
WRN – 531 (K – type)	0 – 1100℃	I, II	1Cr18Ni9Ti, GH3030, etc	90s	Φ16, Φ25	Customizable
S – type	0 – 1600℃	±1.0℃ (0 – 1100℃), ±0.003×(t – 767)℃ (1100 – 1600℃)	Silicon nitride – bonded silicon carbide	Within 60s	Φ18 – Φ22	300 – 1000mm
WRe – type	0 – 2000℃	±2.2℃ or ±0.75% of the measured value	Cerium – stabilized zirconia	About 10 – 15s	Φ6 – Φ10	400 – 800mm

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Applications of Thermocouples for Silicon Nitride Furnaces

Thermocouples for Silicon Nitride Furnaces have important applications in several areas:

In Silicon Nitride Ceramics Production: The properties of Silicon Nitride ceramics require demanding production temperatures. Thermocouples accurately measure the temperature in the furnace in real time to ensure temperature uniformity and stability so that the silicon nitride powder is sintered densely at the right temperature, preventing the ceramic from cracks, pores and other defects due to temperature deviations to ensure that the product’s high strength, high hardness, and good abrasion resistance and other properties.

In the field of semiconductor manufacturing: silicon nitride film is often used in semiconductor manufacturing as an insulating layer or passivation layer. In chemical vapor deposition and other processes, the silicon nitride furnace with thermocouples accurately controls the temperature to provide a stable thermal environment for the reaction to ensure the uniformity, purity and densification of the film, thereby improving the performance and reliability of semiconductor devices, reduce device leakage and short circuit and other issues.

In the field of scientific research, When researchers study the properties and preparation process of silicon nitride materials, they need to precisely control the temperature to explore the changes in the structure and properties of the materials under different temperature conditions. Thermocouples can provide accurate temperature data to help researchers accurately grasp the experimental conditions, provide key support for the development of new materials and process optimization, and promote the development of silicon nitride material science.

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5 FAQs of Thermocouples for Silicon Nitride Furnaces

Q1：Why do silicon nitride furnaces need special thermocouples?

Silicon nitride furnace working temperature can reach 1800-1900 ℃, and there is a strong corrosive atmosphere in the furnace (such as silicon vapor, nitride). Ordinary thermocouples are easy to fail due to oxidation and sulfidation reactions, while the thermocouple for silicon nitride furnace adopts a double-layer protection structure: the outer layer is silicon nitride combined with silicon carbide (Si₃N₄-SiC) protection tube, which is resistant to high temperature up to 1600 ℃ and erosion of aluminum and zinc liquids; and the inner layer is corundum insulated tube, which prevents short-circuiting of the dipole wires. This design extends the life of the thermocouple 3-5 times longer than ordinary thermocouples.

Q2：What details should I pay attention to when installing thermocouples for silicon nitride furnaces?

Thermal stress control: the protection tube (such as silicon carbide or silicon nitride material) is brittle and needs to be slowly warmed up with the furnace (≤ 5 ℃ / min) to avoid sudden cooling and heating leading to cracking. Insertion depth: at least 8-10 times the diameter of the protection tube. To ensure that the measurement end is located in the temperature uniformity zone, avoid being close to the furnace wall or heating elements. Cold end compensation: Use special compensation wire (e.g. KX type) to stabilize the cold end temperature at 0℃ or automatically compensate by the instrument, the error can be controlled within ±1℃.

Q3：How to extend the service life of thermocouple for silicon nitride furnace?

Regular cleaning: clean the protection tube with an ultrasonic wave every quarter to remove the accumulated dirt (such as aluminum oxide adhering in the aluminum liquid will lead to an increase in the thermal resistance; the error can be up to 50 ℃ or more). Insulation test: Measure the insulation resistance with a megohmmeter; it should be ≥100MΩ at room temperature and ≥1MΩ at high temperature; otherwise, the insulating tube needs to be replaced. Calibration cycle: A high-temperature environment (>1000 ℃) is recommended to be calibrated every 3 months, and low and medium-temperature environments can be once every six months; calibration methods include the freezing point method (0 ℃) and boiling point method (100 ℃).

Q4: Do thermocouples for silicon nitride furnaces need to comply with specific standards?

Domestic: need to meet GB/T 16839.1-2015 “Thermocouple Part 1: Indexing Table”; for example, S type thermocouple has a tolerance of ±4℃ at 1000℃.

International: Meet IEC 60584-1 standard, CE certification for EU market, UL standard for North America.

Q5: How to verify the performance of thermocouples for silicon nitride furnaces?

Thermal Potential Test: Use a high-precision potentiometer to measure the output voltage of the thermocouple at a standard temperature point (e.g., 400℃, 800℃); the error should be ≤±0.5% FS. Thermal Shock Test: Rapidly increase the temperature of thermocouple from room temperature to 1200℃, and check the protection tube whether it is cracked or not after cycling for 5 times. Corrosion resistance test: immersed in simulated furnace gas (e.g., 10% N₂+90% H₂S) for 24 hours, weight loss should be < 0.1g/cm².